| Model | MTM-MX-12R |
| Application | 300mm Wafer Inspection Microscope |
| Optical System | Color-corrected infinity optical system |
| Head Type | Binocular (0°–35° tilt) / Trinocular available |
| Eyepiece | 10X / 25mm high eye-point, adjustable diopter |
| Focus System | Coaxial coarse & fine focus, 35mm coarse travel, 0.001mm fine precision |
| Objective System | Motorized 6-position changer |
| Objective Magnification | 5X, 10X, 20X, 50X, 100X |
| Inspection Modes | Brightfield, Darkfield, DIC, Polarization |
| Filter System | Neutral, Red, Green, Blue filters |
| Illumination | 12V 100W reflected light source |
| Stage Travel | 305 mm × 356 mm, 3-layer working stage with clutch control |
| Structure | Anti-vibration design with 6 support base system |