| System Type | Automatic Wafer Transfer System (MacLite Senior Series) |
| Manufacturer | Mactronix |
| Transfer Capability | 25-slot carriers and 50-slot process boat handling |
| Supported Materials | Plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon, Metal Boats |
| Transfer Speed | 50 wafers in under 56 seconds |
| Particle Control | ≤ 1.5 particles >0.23 µm per wafer per transfer (with exhaust) |
| Control Interface | 12-key keypad with 4-line LCD display |
| Control System | Single Board PC Controlled System |
| Power Supply | Auto-switching 110 VAC 60Hz / 240 VAC 50–60Hz |
| Safety Features | Wafer and carrier presence sensors |
| Alignment Control | Maintains wafer flat alignment during transfer |
| Power Failure Protection | No wafer drop; automatic recovery mode after power restoration |
| Application | Semiconductor wafer handling and cleanroom automation |