ARCS HIM-2015 Horizontal Measuring System

Features

• Video system: High Resolution & High Accuracy CCD
• Magnification: 0.3x~1.8x (10x~60x) Step lens
• Illumination: Adjustable surface and contour illumination
• Linear scale: 0.5μm on X, Y-axis
• Length accuracy: ± (3+L/75) μm
• Repeatability: 3μm
• Connection: USB Output + Metrology software
• Software: SI-102 (Optional:SI-101)
• Monitor: 17 inch touch panel