Specifications
- Mikron M335 Blackbodies:
Measurement Uncertainty (°C): ±0.4% of reading ±1 °C
Interface / Output (mA): RS232, RS485
Relative Humidity: 90
CE-label: CE-Label
Device Output Temperature Range (°C): 300 to 1500 °C
Stability: 1 °C per 8-hour period
Heated Emitter Shape: 16.5 mm
Penerangan
Fiber optic temperature sensing for semiconductor in etch and deposition applications
The Advanced Energy's Luxtron® M-1100 is the latest FluorOptic® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLuxTM and RubiLuxTM have been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C.
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Features
- Wide supported temperature range
- Low noise level with fast response rate
- 5 channels in a single converter
- Flexible communication outputs
- EtherCAT Interface (optional)
- Analog output
Benefits
- Non-contact measurement to minimize the thermal offset
- Easy to install into OEM equipment
- Achieve high accuracy and a extreme temperature control for different etching and wafer fab processes
- Receive support from experienced applications engineers to customize probes for OEMs
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