Specifications
- Paramount Plus RF Generator:
Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 1 to 60 MHz
Input Voltage (V): 208 VAC
Power Level (kW): 5 to 15 kW
Rack Width: Full rack
Height (Inches): 3U, 4U
Communications Interface: RS-232, 25-pin analog, Ethernet, DeviceNet, Profibus, EtherCAT
Advanced Features: Pulsing, arc management, CEX, MBFT
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
Description
Paramount Plus RF Generator – Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
Get the broadest feature set available in a pulsed-RF product. The Paramount Plus offers precise RF regulation, sophisticated pulse manipulation, and advanced data acquisition. Designed to cover an extensive range of RF energy — frequencies of 1 to 60 MHz and power levels of 1.5 to 15 kW — the Paramount Plus delivers the repeatability and reliability you require.
Key Features
- Enhanced RF stability with tightly regulated power output
- Advanced multi-level pulsing
- Pulse synchronization and monitoring
- Real-time power and impedance measurement
- Advanced FastDAQ data acquisition system
Benefits
- Precisely control RF
- Enhance plasma stability
- Expedite plasma transitions
- Reduce process times
- Improve process repeatability and chamber matching
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