Nitrogen dioxide (NO2) is a common atmospheric pollutant, mainly from vehicle exhaust, industrial waste gas and air pollution.NO2 gas has an irritating odor and is harmful to human health and the environment. Therefore, the detection and control of NO2 is of great significance.
In recent years, the development of MEMS technology provides new opportunities for the research and application of Nitrogen dioxide sensor.MEMS (microelectromechanical system) refers to tiny mechanical structures, including sensors, actuators, controllers and so on, which are fabricated by using microelectronic fabrication technology. Sensors manufactured using MEMS technology have the advantages of high sensitivity, fast response speed and good stability, which can meet the requirements of high precision and high sensitivity.
Nitrogen dioxide sensor is manufactured by MEMS technology, which mainly includes two parts: sensor circuit and micro pump. The sensor circuit is manufactured by semiconductor process, including PMOS and NMOS transistors, capacitors and resistors. The transistors and capacitors are connected to the gas under test. When NO2 gas passes through the sensor, the gas molecules interact with these components, resulting in changes in voltage and current in the circuit. These changes are converted into electrical signals by the micropump and sent to the signal processing circuit for processing.