| System Type |
XYZ Measuring Microscope (Hisomet – Union) |
| Focus System |
Precise Focus Indicator / Target Mark for High Z-Axis Repeatability |
| Resolution |
1µm / 0.5µm / 0.1µm |
| Stage Travel Options |
50×50mm, 100×50mm, 200×100mm, 250×100mm, 150×150mm, 300×300mm |
| Output System |
Digital Readout Counter or PC with Metrology Software |
| Objective Lenses |
3X, 5X, 10X, 20X, 40X, 100X |
| Measurement Applications |
Wire loop height, die attach height, die placement, BGA ball height, ball diameter, epoxy height, lead frame XYZ measurement |
| Application Fields |
Semiconductor manufacturing, microelectronics, precision engineering, quality control, R&D laboratories |