Yamato HMDS Vacuum Coater for Wafer Priming

Yamato HMDS Vacuum Coater for Wafer Priming

分类: Yamato Semiconductor & Custom Industrial Equipment 当前有货
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Yamato HMDS Vacuum Coater for Wafer Priming

Are you struggling with photoresist adhesion during wafer manufacturing? 
The Yamato HMDS Vacuum Coater is a customized industrial solution engineered specifically for the semiconductor industry.
This system uniformly coats a layer of HMDS (hexamethyldisilazane) onto the surface of silicon wafers and substrates. 
Through a highly controlled heating reaction, it forms a hydrophobic compound that drastically improves the adhesion between the photoresist and the silicon wafer.

⚙️ Key Specifications:
• Heating Method: Four-sided wall heating for absolute uniformity.
• Max Temperature: 200°C.
• Ultimate Vacuum: < 100 Pa.
• Premium Components: Integrated with a high-performance Kashiyama vacuum pump.

Renetech is Malaysia's premier distributor for custom Yamato industrial equipment. Message us on WhatsApp to discuss your wafer manufacturing line requirements!

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