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Yamato HMDS Vacuum Coater for Wafer Priming
Are you struggling with photoresist adhesion during wafer manufacturing?
The Yamato HMDS Vacuum Coater is a customized industrial solution engineered specifically for the semiconductor industry.
This system uniformly coats a layer of HMDS (hexamethyldisilazane) onto the surface of silicon wafers and substrates.
Through a highly controlled heating reaction, it forms a hydrophobic compound that drastically improves the adhesion between the photoresist and the silicon wafer.
⚙️ Key Specifications:
• Heating Method: Four-sided wall heating for absolute uniformity.
• Max Temperature: 200°C.
• Ultimate Vacuum: < 100 Pa.
• Premium Components: Integrated with a high-performance Kashiyama vacuum pump.
Renetech is Malaysia's premier distributor for custom Yamato industrial equipment. Message us on WhatsApp to discuss your wafer manufacturing line requirements!
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