Paramount RF Generator:
Cooling: Hybrid (air and water)
Output Frequency (MHz, kHz): 2 to 60 MHz
Input Voltage (V): 208, 400, 480 VAC
Power Level (kW): 3 to 15 kW
Rack Width: Half and Full rack
Height (Inches): 3U
Communications Interface: EtherCAT, Ethernet, DeviceNet, RS-232
Advanced Features: Pulsing, CEX, arc management, MBFT
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
详情
Industry-Leading, Repeatable Power Delivery for Core Plasma Applications Advance your process development with a new focus on operating flexibility. Paramount® HF RF generators offer wide power ranges, support multiple integration scenarios, and are equipped with standard serial/analog interfaces and other optional communication interfaces. The Paramount HF enables high plasma density and ion energy required by high aspect ratio devices and speeds process for the next node of semiconductor processing tools. The Paramount platform’s digital architecture provides precise power management and streamlines new function integration — no lead times or hardware changes needed. High-power output and repeatable performance is achieved by real-time detection of plasma changes. And internal-protection limits facilitate reliable operation
Key Features
Full digital control
Frequency tuning, pulsing, and pulse synchronization
Real-time power and impedance measurement
Arc management
Phase synchronization (CEX)
Benefits
Enhance plasma stability and process repeatability
