Apex RF Generator:
Cooling: water
Output Frequency (MHz, kHz): 13.56 MHz
Input Voltage (V): 208 VAC
Power Level (kW): 1.5 to 10 kW
Rack Width: 1/2 rack and full rack
Height (Inches): 3U
Communications Interface: RS-232, Analog, ethernet, DeviceNet
Advanced Features: Pulsing, CEX
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
详情
High-Power Density for Compact Installation The versatile Apex® family of RF generators and power-delivery systems showcases a compact, modular design suitable for chamber mounting. Utilizing sophisticated RF-conversion technology, Apex RF generators and power-delivery systems offer enhanced product and process reliability. High-density power capabilities make them ideal for advanced plasma processes. And various communications models and configurable features allow you to customize your platform and explore integration approaches. No custom generator lead times are necessary.
