Navio Match Network:
Cooling: Air
Output Frequency (MHz, kHz): 13 MHz
Input Voltage (V): 24 VDC or 110 VAC
Power Level (kW): 1 to 5 kW
Rack Width: N/A, chamber mounted
Communications Interface: Analog, RS 232
Process Applications: Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
详情
Economical, Digital, Configurable Matching Network Solution The Navio matching network delivers quick, accurate, and repeatable impedance across many applications.
Plug-and-play installation with Advanced Energy’s RF power supplies for thin film applications
Efficient and stable power delivery
Compact and air-cooled
.Key Features
Quick, accurate, and repeatable impedance matching
Optimized, off-the-shelf functionality for many applications
Generous menu of configuration options for more sophisticated processes
Wide power
Compact air-cooled unit
Benefits
Improve throughput, increase yield, and reduce production costs
Choose a standard model or configure a unit that meets your system requirements
Install and operate with ease
Obtain excellent repeatability for high process yield
