Vacuum coating equipment maintenance

1. Oil Management and Contamination Control

Precise Oil Change Cycle: Based on equipment load and process environment, diffusion pump oil should be changed every 6 months (under normal operating conditions). In high-temperature or continuous operation scenarios, this should be shortened to 3-4 months. Oil deterioration can lead to decreased pumping speed, vacuum fluctuations, and even pump body oxidation and corrosion.

Scientific Cleaning Process: For pump core oil deposits, a three-step method is used: "gasoline cleaning → sandpaper carbon removal → high-temperature drying" to prevent secondary contamination of the vacuum chamber by residues.

Contamination Source Control: Contaminants such as grease, acids, alkalis, salts, and water vapor can accelerate pump body wear. It is recommended to conduct airtightness tests on pump body seals and cavity welds quarterly and replace aging seals promptly (e.g., nitrile rubber parts are recommended for mandatory replacement every 2 years).
2. Key Component Maintenance and Performance Optimization

Bearing and Motor Maintenance: Monthly bearing temperature checks (ambient temperature +35℃ is the safe threshold), replenishing with high-temperature grease; every 2000 hours, check motor carbon brush wear to prevent abnormal speed due to poor contact.

Vacuum System Upgrade: For equipment with insufficient pumping efficiency, molecular pump sets can be added or Roots pump modules upgraded to increase the ultimate vacuum to 10⁻⁴ Pa, meeting the requirements of high-end optical coating.

3. Intelligent Operation and Maintenance and Emergency Response

Remote Monitoring System: By installing vacuum sensors and oil temperature monitoring modules, data is transmitted in real time to the enterprise operation and maintenance platform, achieving closed-loop management of "anomaly warning - fault diagnosis - work order dispatch".