SPECIFICATIONS
Minimal Thermal Impact
Deep-UV laser ablation produces virtually no heat-affected zone (HAZ), debris, or oxides.
Precision Material Removal
Flat, uniform beam removes ~1/3 µm per shot with depth control down to 100 nm.
High Accuracy & Repeatability
Confocal setup and sub-micron positioning enable micron-level ablation precision.
Adaptive Energy Control
Continuously variable demagnification optics increase energy density for challenging materials.
User-Friendly Operation
Software routines simplify recipe development, autofocus, and live video monitoring.
Advanced System Integration
Air-cooled excimer laser, pneumatic rotary chuck, mask-projection ablation, fume extraction, and Class 1 safety enclosure ensure safe, reliable operation.
Malaysia
